The high-end silicon nitride powder sintering furnace features H2 safety protection, anti-leakage technology, multi-segment temperature curve setting, automatic precise control of various gas flow rates (without manual adjustment), pulse inflation, gas circulation temperature control, heating element decay detection, heating element leakage monitoring, and comprehensive fault self-diagnosis functions. It is primarily used for the production of high-end silicon nitride powder.

Product Introduction

The high-end silicon nitride powder sintering furnace features H2 safety protection, anti-leakage technology, multi-segment temperature curve setting, automatic precise control of various gas flow rates (without manual adjustment), pulse inflation, gas circulation temperature control, heating element decay detection, heating element leakage monitoring, and comprehensive fault self-diagnosis functions. It is primarily used for the production of high-end silicon nitride powder.

Product parameters
Loading space (W*H*L) 500 * 500 * 1800mm (Customizable)
Maximum temperature 1600 °C
Maximum working pressure 0.9 bar
Limiting vacuum 0.5 pa
Vacuum leakage rate ≤5×10-3  mbarl/s
Vacuum pump set Rotary vane pump + Roots pump
Heating rate
(Full load, ≥1500 °C)
≥8 °C/min
Temperature uniformity Plus or minus 4 °C or less
Have function Vacuum sintering, static sintering, atmosphere sintering, rapid cooling
Type of process gas H2    N2    Ar
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